INNOVATIONS IN MICRO/NANO PATTERNING USING TOOL-BASED METHODS
DOI:
https://doi.org/10.31436/iiumej.v17i2.634Abstract
In recent years, the trend in miniaturization of products has been pervasive in areas such as information technology, biotechnology, and the environmental and medical industries. Micro/Nano patterning is the key supporting technology that has to be developed to meet the challenges posed by the requirements of product miniaturization and the industrial realization of nanotechnology. Micro/Nano patterning techniques can be carried out by techniquesbased on energy beams or solid cuttingtools (tool-based micro-machining). Tool-based micro/nano patterning is a relatively new area; however, over the lasttwo decades, owing to the predominant trend in miniaturization of products, Micro/Nano patterning using tool-based techniques has become a key supportive technology. The energybeam-based patterning process (electron-beam lithography) hassome limitations due to poor control of 3D structures, low material removal rate and low aspect ratio. Moreover, these processes requirespecial facilities, and the maximum achievable thickness is relatively small. Some of theselimitations can be overcome by a tool-based approach using ultra-precision machine tools and solid tools as cutting elements to produce the micro-features with well-controlled shape and tolerances. These Micro/Nano machining-based patterning techniques have been achieved through a paradigm shift in the ideas and processes of conventional machining. In this paper, an attempt has beenmade to present the recent innovations in tool-based micro/nano patterning processes.Downloads
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References
1. Okuyama, H. and H. Takada, Micromachining with SR and FEL. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1998. 144(1–4): p. 58-65.
2. Rajurkar, K.P. and Z.Y. Yu, 3D Micro-EDM Using CAD/CAM. CIRP Annals - Manufacturing Technology, 2000. 49(1): p. 127-130.
3. Shinno, H., 11.02 - Machine Tools for Micro- and Nanometer Scale Processing, in Comprehensive Materials Processing, S.H.F.B.J.V.T. Yilbas, Editor. 2014, Elsevier: Oxford. p. 15-26.
4. SARIX, SARIX | The best Micro EDM technology. http://www.sarix.com/
5. Tec, S., Smal Tec- http://www.smaltec.com/.
6. Rahman, M., et al., A multiprocess machine tool for compound micromachining. International Journal of Machine Tools and Manufacture, 2010. 50(4): p. 344-356.
7. Takashima. http://www.takashima.co.jp/en/index_e.html. 2015.
8. Mikrotools, http://mikrotools.com/. 2015.
9. Zhang, X.Q., K.S. Woon, and M. Rahman, 11.09 - Diamond Turning, in Comprehensive Materials Processing, S.H.F.B.J.V.T. Yilbas, Editor. 2014, Elsevier: Oxford. p. 201-220.
10. Precitech. Nanoform 700 Ultra, Precitech. Nanoform 700 Ultra,http://www.precitech.com/products/nanoform700ultra/nanoform_700_ultra.html. 2013.
11. Moore. Nanotech 350FG, http://www.nanotechsys.com/machines/. 2013.
12. Rahman, M., et al.,Compound Micro/Nano Machining–A Tool-Based Innovative and Integrated Approach. in Key Engineering Materials. 2010. Trans Tech Publ.
13. Azizur Rahman, M., et al., CNC microturning: an application to miniaturization. International Journal of Machine Tools and Manufacture, 2005. 45(6): p. 631-639.
14. Khalid, W., et al., High-aspect-ratio, free-form patterning of carbon nanotube forests using micro-electrodischarge machining. Diamond and Related Materials, 2010. 19(11): p. 1405-1410.
15. Lauwers, B., et al., Hybrid processes in manufacturing. CIRP Annals - Manufacturing Technology, 2014. 63(2): p. 561-583.
16. Asad, A.B.M.A., et al., Tool-based micro-machining. Journal of Materials Processing Technology, 2007. 192–193: p. 204-211.
17. Morgan, C.J., R.R. Vallance, and E.R. Marsh, Micro-machining and micro-grinding with tools fabricated by micro electro-discharge machining. International Journal of Nanomanufacturing, 2006. 1(2): p. 242-258.
18. Ferraris, E., et al., EDM drilling of ultra-high aspect ratio micro holes with insulated tools. CIRP Annals - Manufacturing Technology, 2013. 62(1): p. 191-194.
19. Zeng, Z., et al., A study of micro-EDM and micro-ECM combined milling for 3D metallic micro-structures.Precision Engineering, 2012. 36(3): p. 500-509.
20. 20. Takahata, K.i. and Y.B. Gianchandani, Batch mode micro-electro-discharge machining.Journal of Microelectromechanical Systems, 2002. 11(2): p. 102-110.
21. Nguyen, M.D., M. Rahman, and Y.S. Wong, Simultaneous micro-EDM and micro-ECM in low-resistivity deionized water. International Journal of Machine Tools and Manufacture, 2012. 54–55: p. 55-65.
22. Wüthrich, R. and L.A. Hof, The gas film in spark assisted chemical engraving (SACE)—A key element for micro-machining applications. International Journal of Machine Tools and Manufacture, 2006. 46(7–8): p. 828-835.
23. Sarkar, B.R., B. Doloi, and B. Bhattacharyya, Parametric analysis on electrochemical discharge machining of silicon nitride ceramics. The International Journal of Advanced Manufacturing Technology, 2006. 28(9-10): p. 873-881.
24. Cao, X.D., B.H. Kim, and C.N. Chu, Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining. Precision Engineering, 2009. 33(4): p. 459-465.
25. Cheng, C.-P., et al., Study of gas film quality in electrochemical discharge machining. International Journal of Machine Tools and Manufacture, 2010. 50(8): p. 689-697.
26. Yang, C.-K., et al., Effect of surface roughness of tool
electrode materials in ECDM performance. International Journal of Machine Tools and Manufacture, 2010. 50(12): p. 1088-1096.
27. Zheng, Z.P., et al., 3D microstructuring of Pyrex glass
using the electrochemical discharge machining process. Journal of Micromechanics and Microengineering, 2007. 17(5): p. 960-966.
28. Bhattacharyya, B., B.N. Doloi, and S.K. Sorkhel, Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials. Journal of Materials Processing Technology, 1999. 95(1–3): p. 145-154.
29. Chavoshi, S.Z. and X. Luo, Hybrid micro-machining processes: A review. Precision Engineering, 2015. 41: p.1-23.
30. Kim, G. and B. Loh, Direct machining of micro patterns on nickel alloy and mold steel by vibration assisted cutting. International Journal of Precision Engineering and Manufacturing, 2011. 12(4): p. 583-588.
31. Kim, G. and B. Loh, Cutting force variation with respect to tilt angle of trajectory in elliptical vibration Vgrooving. International Journal of Precision Engineering and Manufacturing, 2013. 14(10): p. 1861-1864.
32. 32. Ammouri, A. and R. Hamade, BUEVA: a bi-directional ultrasonic elliptical vibration actuator for micromachining. The International Journal of Advanced Manufacturing Technology, 2012. 58(9-12): p. 991-1001.
33. 33. Sun, S., M. Brandt, and M.S. Dargusch, Thermally enhanced machining of hard-to-machine materials—A review. International Journal of Machine Tools and Manufacture, 2010. 50(8): p. 663-680.
34. 34. Neo, D.W.K., A.S. Kumar, and M. Rahman, An automated Guilloche machining technique for the fabrication of polygonal Fresnel lens array. Precision Engineering, 2015. 41: p. 55-62.
35. 35. Luttrell, D.E., Innovations in Ultra-Precision Machine Tools: Design and Applications.
36. 36. López de Lacalle, L.N., et al., Using High Pressure Coolant in the Drilling and Turning of Low Machinability Alloys. The International Journal of Advanced Manufacturing Technology, 2000. 16(2): p. 85-91.
37. 37. Scheiding, S., et al., Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo. Optics Express, 2011. 19(24): p. 23938-23951.
38. 38. Keong, N.W., A.S. Kumar, and M. Rahman, A novel method for layered tool path generation in the fast tool servo diamond turning of non-circular microstructural surfaces. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2012: p. 0954405412467118.
39. 39. INFRARED, I.-V.; Available from: http://www.iiviinfrared.com/index.html.
40. 40. Kim, J. and S.-K. Lee, Micro-patterning technique using a rotating cutting tool controlled by an electromagnetic actuator. International Journal of Machine Tools and Manufacture, 2016. 101: p. 52-64.
41. 41. Huang, R., et al., Ultra-precision machining of radial Fresnel lens on roller moulds. CIRP Annals - Manufacturing Technology, 2015. 64(1): p. 121-124.
42. 42. Zhang, X., et al., Diamond micro engraving of gravure roller mould for roll-to-roll printing of fine line electronics. Journal of Materials Processing Technology, 2015. 225: p. 337-346.
2. Rajurkar, K.P. and Z.Y. Yu, 3D Micro-EDM Using CAD/CAM. CIRP Annals - Manufacturing Technology, 2000. 49(1): p. 127-130.
3. Shinno, H., 11.02 - Machine Tools for Micro- and Nanometer Scale Processing, in Comprehensive Materials Processing, S.H.F.B.J.V.T. Yilbas, Editor. 2014, Elsevier: Oxford. p. 15-26.
4. SARIX, SARIX | The best Micro EDM technology. http://www.sarix.com/
5. Tec, S., Smal Tec- http://www.smaltec.com/.
6. Rahman, M., et al., A multiprocess machine tool for compound micromachining. International Journal of Machine Tools and Manufacture, 2010. 50(4): p. 344-356.
7. Takashima. http://www.takashima.co.jp/en/index_e.html. 2015.
8. Mikrotools, http://mikrotools.com/. 2015.
9. Zhang, X.Q., K.S. Woon, and M. Rahman, 11.09 - Diamond Turning, in Comprehensive Materials Processing, S.H.F.B.J.V.T. Yilbas, Editor. 2014, Elsevier: Oxford. p. 201-220.
10. Precitech. Nanoform 700 Ultra, Precitech. Nanoform 700 Ultra,http://www.precitech.com/products/nanoform700ultra/nanoform_700_ultra.html. 2013.
11. Moore. Nanotech 350FG, http://www.nanotechsys.com/machines/. 2013.
12. Rahman, M., et al.,Compound Micro/Nano Machining–A Tool-Based Innovative and Integrated Approach. in Key Engineering Materials. 2010. Trans Tech Publ.
13. Azizur Rahman, M., et al., CNC microturning: an application to miniaturization. International Journal of Machine Tools and Manufacture, 2005. 45(6): p. 631-639.
14. Khalid, W., et al., High-aspect-ratio, free-form patterning of carbon nanotube forests using micro-electrodischarge machining. Diamond and Related Materials, 2010. 19(11): p. 1405-1410.
15. Lauwers, B., et al., Hybrid processes in manufacturing. CIRP Annals - Manufacturing Technology, 2014. 63(2): p. 561-583.
16. Asad, A.B.M.A., et al., Tool-based micro-machining. Journal of Materials Processing Technology, 2007. 192–193: p. 204-211.
17. Morgan, C.J., R.R. Vallance, and E.R. Marsh, Micro-machining and micro-grinding with tools fabricated by micro electro-discharge machining. International Journal of Nanomanufacturing, 2006. 1(2): p. 242-258.
18. Ferraris, E., et al., EDM drilling of ultra-high aspect ratio micro holes with insulated tools. CIRP Annals - Manufacturing Technology, 2013. 62(1): p. 191-194.
19. Zeng, Z., et al., A study of micro-EDM and micro-ECM combined milling for 3D metallic micro-structures.Precision Engineering, 2012. 36(3): p. 500-509.
20. 20. Takahata, K.i. and Y.B. Gianchandani, Batch mode micro-electro-discharge machining.Journal of Microelectromechanical Systems, 2002. 11(2): p. 102-110.
21. Nguyen, M.D., M. Rahman, and Y.S. Wong, Simultaneous micro-EDM and micro-ECM in low-resistivity deionized water. International Journal of Machine Tools and Manufacture, 2012. 54–55: p. 55-65.
22. Wüthrich, R. and L.A. Hof, The gas film in spark assisted chemical engraving (SACE)—A key element for micro-machining applications. International Journal of Machine Tools and Manufacture, 2006. 46(7–8): p. 828-835.
23. Sarkar, B.R., B. Doloi, and B. Bhattacharyya, Parametric analysis on electrochemical discharge machining of silicon nitride ceramics. The International Journal of Advanced Manufacturing Technology, 2006. 28(9-10): p. 873-881.
24. Cao, X.D., B.H. Kim, and C.N. Chu, Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining. Precision Engineering, 2009. 33(4): p. 459-465.
25. Cheng, C.-P., et al., Study of gas film quality in electrochemical discharge machining. International Journal of Machine Tools and Manufacture, 2010. 50(8): p. 689-697.
26. Yang, C.-K., et al., Effect of surface roughness of tool
electrode materials in ECDM performance. International Journal of Machine Tools and Manufacture, 2010. 50(12): p. 1088-1096.
27. Zheng, Z.P., et al., 3D microstructuring of Pyrex glass
using the electrochemical discharge machining process. Journal of Micromechanics and Microengineering, 2007. 17(5): p. 960-966.
28. Bhattacharyya, B., B.N. Doloi, and S.K. Sorkhel, Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials. Journal of Materials Processing Technology, 1999. 95(1–3): p. 145-154.
29. Chavoshi, S.Z. and X. Luo, Hybrid micro-machining processes: A review. Precision Engineering, 2015. 41: p.1-23.
30. Kim, G. and B. Loh, Direct machining of micro patterns on nickel alloy and mold steel by vibration assisted cutting. International Journal of Precision Engineering and Manufacturing, 2011. 12(4): p. 583-588.
31. Kim, G. and B. Loh, Cutting force variation with respect to tilt angle of trajectory in elliptical vibration Vgrooving. International Journal of Precision Engineering and Manufacturing, 2013. 14(10): p. 1861-1864.
32. 32. Ammouri, A. and R. Hamade, BUEVA: a bi-directional ultrasonic elliptical vibration actuator for micromachining. The International Journal of Advanced Manufacturing Technology, 2012. 58(9-12): p. 991-1001.
33. 33. Sun, S., M. Brandt, and M.S. Dargusch, Thermally enhanced machining of hard-to-machine materials—A review. International Journal of Machine Tools and Manufacture, 2010. 50(8): p. 663-680.
34. 34. Neo, D.W.K., A.S. Kumar, and M. Rahman, An automated Guilloche machining technique for the fabrication of polygonal Fresnel lens array. Precision Engineering, 2015. 41: p. 55-62.
35. 35. Luttrell, D.E., Innovations in Ultra-Precision Machine Tools: Design and Applications.
36. 36. López de Lacalle, L.N., et al., Using High Pressure Coolant in the Drilling and Turning of Low Machinability Alloys. The International Journal of Advanced Manufacturing Technology, 2000. 16(2): p. 85-91.
37. 37. Scheiding, S., et al., Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo. Optics Express, 2011. 19(24): p. 23938-23951.
38. 38. Keong, N.W., A.S. Kumar, and M. Rahman, A novel method for layered tool path generation in the fast tool servo diamond turning of non-circular microstructural surfaces. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2012: p. 0954405412467118.
39. 39. INFRARED, I.-V.; Available from: http://www.iiviinfrared.com/index.html.
40. 40. Kim, J. and S.-K. Lee, Micro-patterning technique using a rotating cutting tool controlled by an electromagnetic actuator. International Journal of Machine Tools and Manufacture, 2016. 101: p. 52-64.
41. 41. Huang, R., et al., Ultra-precision machining of radial Fresnel lens on roller moulds. CIRP Annals - Manufacturing Technology, 2015. 64(1): p. 121-124.
42. 42. Zhang, X., et al., Diamond micro engraving of gravure roller mould for roll-to-roll printing of fine line electronics. Journal of Materials Processing Technology, 2015. 225: p. 337-346.
